Invention Grant
US08693095B2 Method and apparatus for decorrelation of spatially and temporally coherent light
有权
用于空间和时间相干光的去相关的方法和装置
- Patent Title: Method and apparatus for decorrelation of spatially and temporally coherent light
- Patent Title (中): 用于空间和时间相干光的去相关的方法和装置
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Application No.: US13753305Application Date: 2013-01-29
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Publication No.: US08693095B2Publication Date: 2014-04-08
- Inventor: Dean Jennings , Timothy N. Thomas , Stephen Moffatt , Jiping Li , Bruce E. Adams , Samuel C. Howells
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson & Sheridan, LLP
- Main IPC: G02F1/01
- IPC: G02F1/01 ; G02B27/28
Abstract:
A method and apparatus for decorrelating coherent light from a light source, such as a pulsed laser, in both time and space in an effort to provide intense and uniform illumination are provided. The techniques and apparatus described herein may be incorporated into any application where intense, uniform illumination is desired, such as pulsed laser annealing, welding, ablating, and wafer stepper illuminating.
Public/Granted literature
- US20130141788A1 METHOD AND APPARATUS FOR DECORRELATION OF SPATIALLY AND TEMPORALLY COHERENT LIGHT Public/Granted day:2013-06-06
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