Invention Grant
US08693637B2 Apparatus and method for generating X-ray using electron cyclotron resonance ion source 失效
使用电子回旋共振离子源产生X射线的装置和方法

Apparatus and method for generating X-ray using electron cyclotron resonance ion source
Abstract:
An apparatus for generating X-ray may include: a plasma chamber; a magnet unit for applying a magnetic field to the plasma chamber, the magnet unit configured to allow the control of the magnitude of the minimum magnetic field in the plasma chamber without change in structure; a microwave generator for applying microwaves to the plasma chamber; a reaction gas injected into the plasma chamber for generating X-ray through electron cyclotron resonance by the magnetic field and the microwaves; a variable guide for focusing the generated X-ray; and a variable extractor for outputting the focused X-ray from the plasma chamber.
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