Invention Grant
US08695427B2 Micromechanical component having a test structure for determining the layer thickness of a spacer layer and method for manufacturing such a test structure 有权
具有用于确定间隔层的层厚度的测试结构的微机械部件和用于制造这种测试结构的方法

Micromechanical component having a test structure for determining the layer thickness of a spacer layer and method for manufacturing such a test structure
Abstract:
A micromechanical component is described including a substrate having a spacer layer and a test structure for ascertaining the thickness of the spacer layer. The test structure includes a seismic mass, which is elastically deflectable along a measuring axis parallel to the substrate, a first electrode system and a second electrode system for deflecting the seismic mass along the measuring axis, having a mass electrode, which is produced by a part of the seismic mass, and a substrate electrode, which is situated on the substrate in each case, the first electrode system being designed to be thicker than the second electrode system by the layer thickness of the spacer layer.
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