Invention Grant
- Patent Title: Multilayer microfluidic probe head and method of fabrication thereof
- Patent Title (中): 多层微流体探针头及其制造方法
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Application No.: US13318675Application Date: 2010-05-07
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Publication No.: US08695639B2Publication Date: 2014-04-15
- Inventor: Emmanuel Delamarche , Ute Drechsler , Robert Lovchik
- Applicant: Emmanuel Delamarche , Ute Drechsler , Robert Lovchik
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Priority: EP09159608 20090507
- International Application: PCT/IB2010/052018 WO 20100507
- International Announcement: WO2010/128483 WO 20101111
- Main IPC: F15C1/06
- IPC: F15C1/06

Abstract:
A micro fluidic probe head includes a first layer, a second layer, and a first tubing port extending from an upper face of the first layer. The first layer has a first via, enabling fluid communication between the first port and a lower face of the first layer. The second layer includes a first aperture on a face, and a first microchannel enabling fluid communication between an upper face of the second layer, facing the lower face of the first layer, and the first aperture. The head enables fluid communication between the first via and the first microchannel. At least a portion of the first microchannel is a groove open on the upper face of the second layer, closed by a portion of a lower face of a layer of the head. The probe head further comprises a second tubing port, a second via, a second aperture and a second micro channel.
Public/Granted literature
- US20120048391A1 MULTILAYER MICROFLUIDIC PROBE HEAD AND METHOD OF FABRICATION THEREOF Public/Granted day:2012-03-01
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