Invention Grant
- Patent Title: Methods of utilizing block copolymer to form patterns
- Patent Title (中): 利用嵌段共聚物形成图案的方法
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Application No.: US12774581Application Date: 2010-05-05
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Publication No.: US08696918B2Publication Date: 2014-04-15
- Inventor: Dan Millward , Scott Sills
- Applicant: Dan Millward , Scott Sills
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: B44C1/22
- IPC: B44C1/22

Abstract:
Some embodiments include methods of forming patterns. A block copolymer film may be formed over a substrate, with the block copolymer having an intrinsic glass transition temperature (Tg,O) and a degradation temperature (Td). A temperature window may be defined to correspond to temperatures (T) within the range of Tg,O≦T≦Td. While the block copolymer is in the upper half of the temperature window, solvent may be dispersed into the block copolymer to a process volume fraction that induces self-assembly of the block copolymer into a pattern. A defect specification may be defined, and the process volume fraction of solvent may be at level that achieves self-assembly within the defect specification. In some embodiments, the solvent may be removed from within the block copolymer while maintaining the defect specification.
Public/Granted literature
- US20110272381A1 Methods Of Utilizing Block Copolymer To Form Patterns Public/Granted day:2011-11-10
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