Invention Grant
US08697021B2 Method for the production of HSiCl3 by catalytic hydrodehalogenation of SiCl4 失效
通过SiCl4的催化加氢脱卤制备HSiCl3的方法

Method for the production of HSiCl3 by catalytic hydrodehalogenation of SiCl4
Abstract:
The invention relates to a process for the catalytic hydrodehalogenation of SiCl4 to form HSiCl3, which comprises bringing a gaseous feed mixture comprising hydrogen and silicon tetrachloride into direct contact with at least one heating element of a resistance heating device, with the heating element being composed of a metal or a metal alloy and being heated to carry out the reaction.
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