Invention Grant
US08697329B2 Positive resist composition and pattern forming method using the same
有权
正型抗蚀剂组合物和使用其的图案形成方法
- Patent Title: Positive resist composition and pattern forming method using the same
- Patent Title (中): 正型抗蚀剂组合物和使用其的图案形成方法
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Application No.: US12046204Application Date: 2008-03-11
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Publication No.: US08697329B2Publication Date: 2014-04-15
- Inventor: Hiromi Kanda , Shinichi Kanna
- Applicant: Hiromi Kanda , Shinichi Kanna
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP2005-356718 20051209
- Main IPC: G03F7/039
- IPC: G03F7/039 ; G03F7/075 ; G03F7/20 ; G03F7/30

Abstract:
A positive resist composition, which comprises: (A) a resin of which solubility in an alkali developer increases under an action of an acid; (B) a compound capable of generating an acid upon irradiation with actinic rays or radiation; (C) a resin having at least one of a fluorine atom and a silicon atom; and (D) a solvent, wherein the resin (C) contains at least one of: (C1) a resin having at least one of a fluorine atom and a silicon atom and having an alicyclic structure; and (C2) a resin containing a repeating unit having at least one of a fluorine atom and a silicon atom in a side chain and a repeating unit having an unsubstituted alkyl group in a side chain; and a pattern forming method.
Public/Granted literature
- US20080171287A1 POSITIVE RESIST COMPOSITION AND PATTERN FORMING METHOD USING THE SAME Public/Granted day:2008-07-17
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