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US08697341B2 Aromatic ring containing polymer, underlayer composition including the same, and associated methods 有权
含有芳香环的聚合物,包含其的底层组合物和相关方法

Aromatic ring containing polymer, underlayer composition including the same, and associated methods
Abstract:
An aromatic ring-containing polymer, an underlayer composition including the same, and associated methods, the aromatic ring-containing polymer including a group represented by one of the following Chemical Formulae 1-1, 1-2, 2-1, and 2-2:
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