Invention Grant
US08697470B2 Miniature MEMS condenser microphone packages and fabrication method thereof
有权
微型MEMS电容麦克风封装及其制造方法
- Patent Title: Miniature MEMS condenser microphone packages and fabrication method thereof
- Patent Title (中): 微型MEMS电容麦克风封装及其制造方法
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Application No.: US13664449Application Date: 2012-10-31
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Publication No.: US08697470B2Publication Date: 2014-04-15
- Inventor: Yunlong Wang
- Applicant: General Mems Corporation
- Applicant Address: US CA Sunnyvale
- Assignee: General Mems Corporation
- Current Assignee: General Mems Corporation
- Current Assignee Address: US CA Sunnyvale
- Agency: McClure, Qualey & Rodack, LLP
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
MEMS microphone packages and fabrication methods thereof are disclosed. One method for fabricating a MEMS microphone package, includes providing a substrate, forming a cavity enclosed by a top cover part, wherein a housing wall part surrounds and supports the top cover part, and the substrate supports the housing wall part and the cover part, forming a MEMS sensing element and an IC chip inside the cavity, forming an opening comprising an acoustic passage connecting the cavity to an ambient space, and forming a conductive casing enclosing the top cover part and the housing wall, wherein the conductive casing is soldered to a PCB board and is electrically connected to a common analog ground lead on the PCB board.
Public/Granted literature
- US20130059409A1 MINIATURE MEMS CONDENSER MICROPHONE PACKAGES AND FABRICATION METHOD THEREOF Public/Granted day:2013-03-07
Information query
IPC分类: