Invention Grant
- Patent Title: Image sensor with improved dark current performance
- Patent Title (中): 具有改善暗电流性能的图像传感器
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Application No.: US13295145Application Date: 2011-11-14
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Publication No.: US08697472B2Publication Date: 2014-04-15
- Inventor: Wei-Chih Weng , Hsun-Ying Huang , Yung-Cheng Chang , Jin-Hong Cho
- Applicant: Wei-Chih Weng , Hsun-Ying Huang , Yung-Cheng Chang , Jin-Hong Cho
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L31/102

Abstract:
Provided is a semiconductor image sensor device. The image sensor device includes a semiconductor substrate that includes an array region and a black level correction region. The array region contains a plurality of radiation-sensitive pixels. The black level correction region contains one or more reference pixels. The substrate has a front side and a back side. The image sensor device includes a first compressively-stressed layer formed on the back side of the substrate. The first compressively-stressed layer contains silicon nitride. The image sensor device includes a metal shield formed on the compressively-stressed layer. The metal shield is formed over at least a portion of the black level correction region. The image sensor device includes a second compressively-stressed layer formed on the metal shield and the first compressively-stressed layer. The second compressively-stressed layer contains silicon oxide. A sidewall of the metal shield is protected by the second compressively-stressed layer.
Public/Granted literature
- US20130119500A1 IMAGE SENSOR WITH IMPROVED DARK CURRENT PERFORMANCE Public/Granted day:2013-05-16
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