Invention Grant
- Patent Title: Methods for forming backside illuminated image sensors with front side metal redistribution layers
- Patent Title (中): 用前侧金属再分布层形成背面照明图像传感器的方法
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Application No.: US13112871Application Date: 2011-05-20
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Publication No.: US08697473B2Publication Date: 2014-04-15
- Inventor: Swarnal Borthakur , Kevin W. Hutto , Andrew Perkins , Marc Sulfridge
- Applicant: Swarnal Borthakur , Kevin W. Hutto , Andrew Perkins , Marc Sulfridge
- Applicant Address: KY George Town
- Assignee: Aptina Imaging Corporation
- Current Assignee: Aptina Imaging Corporation
- Current Assignee Address: KY George Town
- Agency: Treyz Law Group
- Agent Jennifer Luh
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L31/0203 ; H01L31/0224 ; H01L27/146

Abstract:
Methods for forming backside illuminated (BSI) image sensors having metal redistribution layers (RDL) and solder bumps for high performance connection to external circuitry are provided. In one embodiment, a BSI image sensor with RDL and solder bumps may be formed using a temporary carrier during manufacture that is removed prior to completion of the BSI image sensor. In another embodiment, a BSI image sensor with RDL and solder bumps may be formed using a permanent carrier during manufacture that partially remains in the completed BSI image sensor. A BSI image sensor may be formed before formation of a redistribution layer on the front side of the BSI image sensor. A redistribution layer may, alternatively, be formed on the front side of an image wafer before formation of BSI components such as microlenses and color filters on the back side of the image wafer.
Public/Granted literature
- US20120193741A1 METHODS FOR FORMING BACKSIDE ILLUMINATED IMAGE SENSORS WITH FRONT SIDE METAL REDISTRIBUTION LAYERS Public/Granted day:2012-08-02
Information query
IPC分类: