Invention Grant
- Patent Title: Method for forming semiconductor device
- Patent Title (中): 半导体器件形成方法
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Application No.: US13722900Application Date: 2012-12-20
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Publication No.: US08697502B2Publication Date: 2014-04-15
- Inventor: Young Man Cho
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon
- Assignee: SK Hynix Inc.
- Current Assignee: SK Hynix Inc.
- Current Assignee Address: KR Icheon
- Priority: KR10-2012-0056911 20120529
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method for forming a semiconductor device is disclosed. In the semiconductor device, a gate is formed to enclose a fin structure in a 6F2 saddle fin gate structure transistor, so that the size of a channel region increases. In accordance with an aspect of the present invention, a method for forming a semiconductor device includes: defining an active region by forming a device isolation film over a semiconductor substrate; forming a first recess extending to a first level in the active region; forming a sacrificial film at a lower portion of the first recess; forming a fin structure over the sacrificial film; separating the fin structure from the semiconductor substrate in the active region by removing the sacrificial film and forming a hole between the fin structure and the active region; and forming a gate to enclose the fin structure.
Public/Granted literature
- US20130323911A1 METHOD FOR FORMING SEMICONDUCTOR DEVICE Public/Granted day:2013-12-05
Information query
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