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US08697502B2 Method for forming semiconductor device 失效
半导体器件形成方法

  • Patent Title: Method for forming semiconductor device
  • Patent Title (中): 半导体器件形成方法
  • Application No.: US13722900
    Application Date: 2012-12-20
  • Publication No.: US08697502B2
    Publication Date: 2014-04-15
  • Inventor: Young Man Cho
  • Applicant: SK hynix Inc.
  • Applicant Address: KR Icheon
  • Assignee: SK Hynix Inc.
  • Current Assignee: SK Hynix Inc.
  • Current Assignee Address: KR Icheon
  • Priority: KR10-2012-0056911 20120529
  • Main IPC: H01L21/00
  • IPC: H01L21/00
Method for forming semiconductor device
Abstract:
A method for forming a semiconductor device is disclosed. In the semiconductor device, a gate is formed to enclose a fin structure in a 6F2 saddle fin gate structure transistor, so that the size of a channel region increases. In accordance with an aspect of the present invention, a method for forming a semiconductor device includes: defining an active region by forming a device isolation film over a semiconductor substrate; forming a first recess extending to a first level in the active region; forming a sacrificial film at a lower portion of the first recess; forming a fin structure over the sacrificial film; separating the fin structure from the semiconductor substrate in the active region by removing the sacrificial film and forming a hole between the fin structure and the active region; and forming a gate to enclose the fin structure.
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