Invention Grant
US08697521B2 Structure and method for making low leakage and low mismatch NMOSFET
失效
低泄漏和低失配NMOSFET的结构和方法
- Patent Title: Structure and method for making low leakage and low mismatch NMOSFET
- Patent Title (中): 低泄漏和低失配NMOSFET的结构和方法
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Application No.: US12691183Application Date: 2010-01-21
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Publication No.: US08697521B2Publication Date: 2014-04-15
- Inventor: Xinlin Wang , Xiangdong Chen , Haining S. Yang
- Applicant: Xinlin Wang , Xiangdong Chen , Haining S. Yang
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Joseph P. Abate; Howard M. Cohn
- Main IPC: H01L27/092
- IPC: H01L27/092

Abstract:
An improved SRAM and fabrication method are disclosed. The method comprises use of a nitride layer to encapsulate PFETs and logic NFETs, protecting the gates of those devices from oxygen exposure. NFETs that are used in the SRAM cells are exposed to oxygen during the anneal process, which alters the effective work function of the gate metal, such that the threshold voltage is increased, without the need for increasing the dopant concentration, which can adversely affect issues such as mismatch due to random dopant fluctuation, GIDL and junction leakage.
Public/Granted literature
- US20110175170A1 STRUCTURE AND METHOD FOR MAKING LOW LEAKAGE AND LOW MISMATCH NMOSFET Public/Granted day:2011-07-21
Information query
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