Invention Grant
- Patent Title: Direct contact heat control of micro structures
- Patent Title (中): 微结构的直接接触热控制
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Application No.: US12810883Application Date: 2008-12-29
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Publication No.: US08697545B2Publication Date: 2014-04-15
- Inventor: Frederic Nabki , Mourad El-Gamal , Tomas A. Dusatko
- Applicant: Frederic Nabki , Mourad El-Gamal , Tomas A. Dusatko
- Applicant Address: CA Montreal, Quebec
- Assignee: The Royal Institution for the Advancement of Learning/McGill University
- Current Assignee: The Royal Institution for the Advancement of Learning/McGill University
- Current Assignee Address: CA Montreal, Quebec
- Agency: Freedman & Associates
- International Application: PCT/CA2008/002243 WO 20081229
- International Announcement: WO2009/082812 WO 20090709
- Main IPC: H01L21/30
- IPC: H01L21/30
Abstract:
A method for manufacturing microelectromechanical structures (MEMS) is disclosed. A low temperature MEMS device is designed. The low temperature MEM device is based upon a semiconductor manufacturing process comprising at least one semiconductor process for providing at least a heater therein. Each semiconductor process used in implementing the design is limited to a maximum temperature of the in-process low temperature MEMs device or a substrate onto which the low temperature MEMS device is being manufactured to below 300° C.
Public/Granted literature
- US20100279451A1 DIRECT CONTACT HEAT CONTROL OF MICRO STRUCTURES Public/Granted day:2010-11-04
Information query
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