Invention Grant
US08698376B2 Microelectromechanical systems (MEMS) resonators and related apparatus and methods
有权
微机电系统（MEMS）谐振器及相关设备和方法
- Patent Title: Microelectromechanical systems (MEMS) resonators and related apparatus and methods
- Patent Title (中): 微机电系统（MEMS）谐振器及相关设备和方法
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Application No.: US13681904Application Date: 2012-11-20
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Publication No.: US08698376B2Publication Date: 2014-04-15
- Inventor: David M. Chen , Jan H. Kuypers , Pritiraj Mohanty , Klaus Juergen Schoepf , Guiti Zolfagharkhani , Jason Goodelle , Reimund Rebel
- Applicant: David M. Chen , Jan H. Kuypers , Pritiraj Mohanty , Klaus Juergen Schoepf , Guiti Zolfagharkhani , Jason Goodelle , Reimund Rebel
- Applicant Address: US MA Cambridge
- Assignee: Sand 9, Inc.
- Current Assignee: Sand 9, Inc.
- Current Assignee Address: US MA Cambridge
- Agency: Wolf, Greenfield & Sacks, P.C.
- Main IPC: H01L41/04
- IPC: H01L41/04
Abstract:
Devices having piezoelectric material structures integrated with substrates are described. Fabrication techniques for forming such devices are also described. The fabrication may include bonding a piezoelectric material wafer to a substrate of a differing material. A structure, such as a resonator, may then be formed from the piezoelectric material wafer.
Public/Granted literature
- US20130140944A1 MICROELECTROMECHANICAL SYSTEMS (MEMS) RESONATORS AND RELATED APPARATUS AND METHODS Public/Granted day:2013-06-06
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