Invention Grant
- Patent Title: Multi-wavelength pumping to sustain hot plasma
- Patent Title (中): 多波长泵送以维持热等离子体
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Application No.: US13119491Application Date: 2010-02-12
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Publication No.: US08698399B2Publication Date: 2014-04-15
- Inventor: Ilya V. Bezel , Anatoly Shchemelinin , Eugene Shifrin , Matthew W. Derstine , Richard W. Solarz
- Applicant: Ilya V. Bezel , Anatoly Shchemelinin , Eugene Shifrin , Matthew W. Derstine , Richard W. Solarz
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Leudeka Neely Group, P.C.
- Agent Rick Barnes
- International Application: PCT/US2010/024074 WO 20100212
- International Announcement: WO2010/093903 WO 20100819
- Main IPC: H05H1/24
- IPC: H05H1/24

Abstract:
A method of sustaining a plasma, by focusing a first wavelength of electromagnetic radiation into a gas within a volume, where the first wavelength is substantially absorbed by a first species of the gas and delivers energy into a first region of a plasma having a first size and a first temperature. A second wavelength of electromagnetic radiation is focused into the first region of the plasma, where the second wavelength is different than the first wavelength and is substantially absorbed by a second species of the gas and delivers energy into a second region of the plasma region within the first region of the plasma having a second size that is smaller than the first size and a second temperature that is greater than the first temperature.
Public/Granted literature
- US20110291566A1 Multi-Wavelength Pumping to Sustain Hot Plasma Public/Granted day:2011-12-01
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