Invention Grant
- Patent Title: Object thickness and surface profile measurements
- Patent Title (中): 物体厚度和表面轮廓测量
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Application No.: US13043784Application Date: 2011-03-09
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Publication No.: US08698891B2Publication Date: 2014-04-15
- Inventor: Justin Turner , Tyler Steele , Stephen L. Mielke , Xavier M. Colonna De Lega , Bruce E. Truax , Andrew D. Meigs
- Applicant: Justin Turner , Tyler Steele , Stephen L. Mielke , Xavier M. Colonna De Lega , Bruce E. Truax , Andrew D. Meigs
- Applicant Address: US CT Middlefield
- Assignee: Zygo Corporation
- Current Assignee: Zygo Corporation
- Current Assignee Address: US CT Middlefield
- Agency: Fish & Richardson P.C.
- Main IPC: H04N7/18
- IPC: H04N7/18 ; G01B11/02

Abstract:
Determining spatial information about a part includes positioning the part in a fixture having two reference surfaces, where the part is positioned between the two reference surfaces, imaging the two reference surfaces and opposing surfaces of the part to different locations of a multi-element detector, simultaneously acquiring images of the opposing sides of the part and the two reference surfaces using the multi-element detector, and determining spatial information about the part based on the simultaneously acquired images.
Public/Granted literature
- US20120229621A1 OBJECT THICKNESS AND SURFACE PROFILE MEASUREMENTS Public/Granted day:2012-09-13
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