Invention Grant
US08699014B2 Measuring member, sensor, measuring method, exposure apparatus, exposure method, and device producing method
有权
测量部件，传感器，测量方法，曝光装置，曝光方法和装置制造方法
- Patent Title: Measuring member, sensor, measuring method, exposure apparatus, exposure method, and device producing method
- Patent Title (中): 测量部件，传感器，测量方法，曝光装置，曝光方法和装置制造方法
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Application No.: US12591925Application Date: 2009-12-04
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Publication No.: US08699014B2Publication Date: 2014-04-15
- Inventor: Masayuki Shiraishi
- Applicant: Masayuki Shiraishi
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oliff, PLC
- Priority: JP2007-154020 20070611
- Main IPC: G01B9/00
- IPC: G01B9/00 ; G03B27/52 ; G03B27/32 ; G03C5/00
Abstract:
A measuring member has a first face and a plurality of first marks arranged on the first face. The first marks have respective orientations corresponding to their positions in a first direction.
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