Invention Grant
US08699728B2 Acoustic sensor 有权
声传感器

Acoustic sensor
Abstract:
A vibrating electrode plate 24 that senses a sound pressure faces a counter electrode plate 25 to form a capacitance type acoustic sensor. Acoustic perforations are opened in the counter electrode plate 25 in order to allow vibration to pass through. The acoustic perforations opened in the counter electrode plate 25 include plural acoustic perforations 31 having a relatively small opening area and one acoustic perforation 36 having a relatively large opening area. The acoustic perforations 31 and 36 are disposed into a lattice shape at equal intervals. Assuming that L is a width of a diaphragm 28, in the counter electrode plate 25, the acoustic perforation 36 having the large opening area is provided within a circular region a having a radius r=L/4 around a position facing a center of the diaphragm 28.
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