Invention Grant
US08702826B2 Abrasive agent, method for producing abrasive agents, and electronic device
有权
研磨剂，研磨剂的制造方法以及电子装置
- Patent Title: Abrasive agent, method for producing abrasive agents, and electronic device
- Patent Title (中): 研磨剂，研磨剂的制造方法以及电子装置
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Application No.: US13856516Application Date: 2013-04-04
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Publication No.: US08702826B2Publication Date: 2014-04-22
- Inventor: Sadahiro Kishii
- Applicant: Fujitsu Limited
- Applicant Address: JP Kawasaki
- Assignee: Fujitsu Limited
- Current Assignee: Fujitsu Limited
- Current Assignee Address: JP Kawasaki
- Agency: Kratz, Quintos & Hanson, LLP
- Priority: JP2012-135256 20120614
- Main IPC: C09G1/02
- IPC: C09G1/02 ; H01L21/02
Abstract:
A method for producing abrasive agents includes: adding a silica to a manganese compound; heat-treating the manganese compound to which the silica has been added; forming abrasive grains by milling the manganese compound to which the silica has been added and which has been heat-treated; and adding a solvent to the abrasive grains.
Public/Granted literature
- US20130333298A1 ABRASIVE AGENT, METHOD FOR PRODUCING ABRASIVE AGENTS, AND ELECTRONIC DEVICE Public/Granted day:2013-12-19
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