Invention Grant
- Patent Title: Balancing a microelectromechanical system
- Patent Title (中): 平衡微机电系统
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Application No.: US13151539Application Date: 2011-06-02
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Publication No.: US08702997B2Publication Date: 2014-04-22
- Inventor: Pavel Kornilovich , Vladek Kasperchik , James William Stasiak
- Applicant: Pavel Kornilovich , Vladek Kasperchik , James William Stasiak
- Applicant Address: US TX Houston
- Assignee: Hewlett-Packard Development Company, L.P.
- Current Assignee: Hewlett-Packard Development Company, L.P.
- Current Assignee Address: US TX Houston
- Main IPC: C23F1/00
- IPC: C23F1/00

Abstract:
A method of balancing a microelectromechanical system comprises determining if a microelectromechanical system is balanced in a plurality of orthogonal dimensions, and if the microelectromechanical system is not balanced, selectively depositing a first volume of jettable material on a portion of the microelectromechanical system to balance the microelectromechanical system in the plurality of orthogonal dimensions. A jettable material for balancing a microelectromechanical system comprises a vehicle, and a dispersion of nano-particles within the vehicle, in which the total mass of jettable material deposited on the microelectromechanical system is equal to the weight percentage of nano-particles dispersed within the vehicle multiplied by the mass of jettable material deposited on the microelectromechanical system. A microelectromechanical system comprises a number of unbalanced structures, and a number of droplets of jettable material disposed on the unbalanced structures, in which the droplets of jettable material balance the unbalanced structures in a plurality of orthogonal dimensions.
Public/Granted literature
- US20120306030A1 BALANCING A MICROELECTROMECHANICAL SYSTEM Public/Granted day:2012-12-06
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