Invention Grant
- Patent Title: Slimming method of carbon-containing thin film and oxidation apparatus
- Patent Title (中): 含碳薄膜和氧化装置的减肥方法
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Application No.: US13330004Application Date: 2011-12-19
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Publication No.: US08703000B2Publication Date: 2014-04-22
- Inventor: Jun Sato , Masayuki Hasegawa
- Applicant: Jun Sato , Masayuki Hasegawa
- Applicant Address: JP
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP
- Agency: Cantor Colburn LLP
- Priority: JP2010-282675 20101220
- Main IPC: H01L21/302
- IPC: H01L21/302
Abstract:
A slimming method includes transferring an object to be processed on which a patterned carbon-containing thin film is formed into a process chamber in an oxidation apparatus; and oxidizing and removing the surface of the carbon-containing thin film by an oxidizing gas while supplying moisture into the process chamber, to reduce widths of the protruded portions on the pattern of the carbon-containing thin film.
Public/Granted literature
- US20120156888A1 SLIMMING METHOD OF CARBON-CONTAINING THIN FILM AND OXIDATION APPARATUS Public/Granted day:2012-06-21
Information query
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