Invention Grant
- Patent Title: Polishing composition and polishing method using the same
- Patent Title (中): 抛光组合物和抛光方法使用相同
-
Application No.: US13010033Application Date: 2011-01-20
-
Publication No.: US08703007B2Publication Date: 2014-04-22
- Inventor: Tomohiko Akatsuka , Yasuto Ishida , Kanako Fukuda , Yoshihiro Kachi , Hisanori Tansho
- Applicant: Tomohiko Akatsuka , Yasuto Ishida , Kanako Fukuda , Yoshihiro Kachi , Hisanori Tansho
- Applicant Address: JP Kiyosu-shi, Aichi
- Assignee: Fujimi Incorporated
- Current Assignee: Fujimi Incorporated
- Current Assignee Address: JP Kiyosu-shi, Aichi
- Agency: Vidas, Arrett & Steinkraus
- Priority: JP2010-013431 20100125
- Main IPC: C09K13/00
- IPC: C09K13/00 ; B44C1/22

Abstract:
A polishing composition of the present invention contains an oxidant, an anticorrosive, and a surfactant comprising a compound represented by Chemical Formula 1: One to three of R1 to R5 in Chemical Formula 1 are alkyl groups, alkynyl groups, alkenyl groups, aryl groups, or arylalkylene groups, one is a hydrogen atom or an alkyl group having 1 to 9 carbon atoms, and the remainder are hydrogen atoms. O—R6 is oxyethylene, oxypropylene, or a random or block conjugate of oxyethylene and oxypropylene. n is an integer of 1 or more. X is an OSO3− group, an OPO32− group, or an OH group.
Public/Granted literature
- US20110180511A1 Polishing Composition and Polishing Method Using the Same Public/Granted day:2011-07-28
Information query