Invention Grant
- Patent Title: Volatile imidazoles and group 2 imidazole based metal precursors
- Patent Title (中): 挥发性咪唑和2族咪唑基金属前体
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Application No.: US13016127Application Date: 2011-01-28
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Publication No.: US08703103B2Publication Date: 2014-04-22
- Inventor: John Anthony Thomas Norman , Melanie K. Perez , Moo-Sung Kim
- Applicant: John Anthony Thomas Norman , Melanie K. Perez , Moo-Sung Kim
- Applicant Address: US PA Allentown
- Assignee: Air Products and Chemicals, Inc.
- Current Assignee: Air Products and Chemicals, Inc.
- Current Assignee Address: US PA Allentown
- Agent Geoffrey L. Chase; Joseph D. Rossi
- Main IPC: A61B5/055
- IPC: A61B5/055

Abstract:
Sterically hindered imidazole ligands are described, along with their synthesis, which are capable of coordinating to Group 2 metals, such as: calcium, magnesium, strontium, in an eta-5 coordination mode which permits the formation of monomeric or dimeric volatile complexes.A compound comprising one or more polysubstituted imidazolate anions coordinated to a metal selected from the group consisting of barium, strontium, magnesium, radium or calcium or mixtures thereof. Alternatively, one anion can be substituted with and a second non-imidazolate anion.Synthesis of the novel compounds and their use to form BST films is also contemplated.
Public/Granted literature
- US20120035351A1 Volatile Imidazoles and Group 2 Imidazole Based Metal Precursors Public/Granted day:2012-02-09
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