Invention Grant
US08703387B2 Resist composition, method of forming resist pattern, novel compound, and acid generator
有权
抗蚀剂组合物,抗蚀剂图案形成方法,新型化合物和酸发生剂
- Patent Title: Resist composition, method of forming resist pattern, novel compound, and acid generator
- Patent Title (中): 抗蚀剂组合物,抗蚀剂图案形成方法,新型化合物和酸发生剂
-
Application No.: US13478390Application Date: 2012-05-23
-
Publication No.: US08703387B2Publication Date: 2014-04-22
- Inventor: Akiya Kawaue , Yoshiyuki Utsumi
- Applicant: Akiya Kawaue , Yoshiyuki Utsumi
- Applicant Address: JP Kawasaki-shi
- Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee Address: JP Kawasaki-shi
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: JP2011-117366 20110525
- Main IPC: G03F1/00
- IPC: G03F1/00 ; G03F7/00 ; C07C309/25 ; C07C317/04 ; C07D327/10

Abstract:
A resist composition comprising a base component (A) which exhibits changed solubility in a developing solution under action of acid and an acid-generator component (B) which generates acid upon exposure, the acid-generator component (B) comprising an acid generator (B1) composed of a compound represented by general formula (b1-1) shown below [wherein, X represents a cyclic group of 3 to 30 carbon atoms which may have a substituent, provided that a ring skelton of the cyclic group contains an —SO2— bond or an —O—SO2— bond, and at least one carbon atom which is not adjacent to the —SO2— bond or the —O—SO2— bond has an oxygen atom as a substituent; Q1 represents a divalent linking group or a single bond; Y1 represents an alkylene group which may have a substituent or a fluorinated alkylene group which may have a substituent; and A+ represents an organic cation]. [Chemical Formula 1] X-Q1-Y1—SO3⊖A⊕ (b1-1)
Public/Granted literature
- US20120301829A1 RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN, NOVEL COMPOUND, AND ACID GENERATOR Public/Granted day:2012-11-29
Information query