Invention Grant
US08703387B2 Resist composition, method of forming resist pattern, novel compound, and acid generator 有权
抗蚀剂组合物,抗蚀剂图案形成方法,新型化合物和酸发生剂

Resist composition, method of forming resist pattern, novel compound, and acid generator
Abstract:
A resist composition comprising a base component (A) which exhibits changed solubility in a developing solution under action of acid and an acid-generator component (B) which generates acid upon exposure, the acid-generator component (B) comprising an acid generator (B1) composed of a compound represented by general formula (b1-1) shown below [wherein, X represents a cyclic group of 3 to 30 carbon atoms which may have a substituent, provided that a ring skelton of the cyclic group contains an —SO2— bond or an —O—SO2— bond, and at least one carbon atom which is not adjacent to the —SO2— bond or the —O—SO2— bond has an oxygen atom as a substituent; Q1 represents a divalent linking group or a single bond; Y1 represents an alkylene group which may have a substituent or a fluorinated alkylene group which may have a substituent; and A+ represents an organic cation]. [Chemical Formula 1] X-Q1-Y1—SO3⊖A⊕  (b1-1)
Information query
Patent Agency Ranking
0/0