Invention Grant
- Patent Title: Thin-film transistor array substrate and manufacturing method thereof
- Patent Title (中): 薄膜晶体管阵列基板及其制造方法
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Application No.: US13574243Application Date: 2012-05-09
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Publication No.: US08703559B2Publication Date: 2014-04-22
- Inventor: Hua Huang , Pei Jia
- Applicant: Hua Huang , Pei Jia
- Applicant Address: CN Guangdong
- Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Current Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Current Assignee Address: CN Guangdong
- Priority: CN201210132082 20120428
- International Application: PCT/CN2012/075250 WO 20120509
- International Announcement: WO2013/159398 WO 20131031
- Main IPC: H01L21/84
- IPC: H01L21/84 ; H01L21/00

Abstract:
The present invention discloses a thin-film transistor (TFT) array substrate and a manufacturing method thereof. Depositing a transparent conductive layer and a first metal layer in turn on a substrate patterned by a first multi-tone mask (MTM) to form a gate, a common electrode and a reflecting layer; depositing a gate insulation layer and a semiconductor layer patterned by a second MTM to remain the semiconductor layer on the gate; and depositing a second metal layer patterned by a third MTM to form a source and a drain.
Public/Granted literature
- US20130285058A1 THIN-FILM TRANSISTOR ARRAY SUBSTRATE AND MANUFACTURING METHOD THEREOF Public/Granted day:2013-10-31
Information query
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