Invention Grant
US08704117B2 RF MEMS switch using change in shape of fine liquid metal droplet
失效
RF MEMS开关采用细微液晶金属液滴的形状变化
- Patent Title: RF MEMS switch using change in shape of fine liquid metal droplet
- Patent Title (中): RF MEMS开关采用细微液晶金属液滴的形状变化
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Application No.: US13509363Application Date: 2010-11-10
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Publication No.: US08704117B2Publication Date: 2014-04-22
- Inventor: Joonwon Kim , Seong-Ho Son , Soon Young Eom , Usung Park , Seungbum Baek
- Applicant: Joonwon Kim , Seong-Ho Son , Soon Young Eom , Usung Park , Seungbum Baek
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Agency: William Park & Associates Patent Ltd.
- Priority: KR10-2009-0109304 20091112
- International Application: PCT/KR2010/007928 WO 20101110
- International Announcement: WO2011/059235 WO 20110519
- Main IPC: H01H57/00
- IPC: H01H57/00

Abstract:
An RF MEMS switch using a fine liquid metal droplet is provided. The RF MEMS switch using a fine liquid metal droplet includes: a first layer member having a signal transmission line; a second layer member disposed on the first layer member, and having a chamber formed corresponding to the signal transmission line so as to induce a change in the shape of the fine liquid metal droplet and a through hole formed at one side of the chamber so as to bring the fine liquid metal droplet, whose shape is to be changed in the chamber, into contact or non-contact with the signal transmission line; an operating member disposed on the second layer member, and provided at an open side of the chamber so as to provide deformability to the fine liquid metal droplet through the open side of the chamber; and a third layer member for defining the position of the operating member, and coupled to the first layer member and the second layer member.
Public/Granted literature
- US20120222944A1 RF MEMS SWITCH USING CHANGE IN SHAPE OF FINE LIQUID METAL DROPLET Public/Granted day:2012-09-06
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