Invention Grant
- Patent Title: Electron microscope, electron-microscope image-reconstruction system and electron-microscope image-reconstruction method
- Patent Title (中): 电子显微镜,电子显微镜图像重建系统和电子显微镜图像重建方法
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Application No.: US13883989Application Date: 2011-10-14
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Publication No.: US08704177B2Publication Date: 2014-04-22
- Inventor: Takashi Kubo , Hiroyuki Kobayashi
- Applicant: Takashi Kubo , Hiroyuki Kobayashi
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Miles & Stockbridge P.C.
- Priority: JP2010-265895 20101130
- International Application: PCT/JP2011/005750 WO 20111014
- International Announcement: WO2012/073424 WO 20120607
- Main IPC: G01N23/00
- IPC: G01N23/00 ; G21K7/00

Abstract:
There is provided an image-reconstruction system capable of implementing a multi-axes reconstruction technique for lessening a burden on the part of a user, and precluding artifacts high in contrast, contamination of a sample, and restrictions imposed on a sample for use, occurring due to use of markings.A plurality of tilt-images photographed by tilting a sample at sample-tilt axes, differing from each other; are acquired, misregistration is corrected by a rotation step-angle, a rotated object under observation is tilted in angle-steps, differing from each other, to pick up images thereof, two reconstruction images obtained by correcting respective misregistrations of two reconstruction images created from respective tilt-image groups are created, and one reconstruction image is created by superimposing one of the two reconstruction images on the other.
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