Invention Grant
US08704177B2 Electron microscope, electron-microscope image-reconstruction system and electron-microscope image-reconstruction method 有权
电子显微镜,电子显微镜图像重建系统和电子显微镜图像重建方法

Electron microscope, electron-microscope image-reconstruction system and electron-microscope image-reconstruction method
Abstract:
There is provided an image-reconstruction system capable of implementing a multi-axes reconstruction technique for lessening a burden on the part of a user, and precluding artifacts high in contrast, contamination of a sample, and restrictions imposed on a sample for use, occurring due to use of markings.A plurality of tilt-images photographed by tilting a sample at sample-tilt axes, differing from each other; are acquired, misregistration is corrected by a rotation step-angle, a rotated object under observation is tilted in angle-steps, differing from each other, to pick up images thereof, two reconstruction images obtained by correcting respective misregistrations of two reconstruction images created from respective tilt-image groups are created, and one reconstruction image is created by superimposing one of the two reconstruction images on the other.
Information query
Patent Agency Ranking
0/0