Invention Grant
US08704191B2 Film bulk acoustic wave resonator-based high energy radiation detectors and methods using the same
有权
基于薄膜体声波谐振器的高能辐射探测器及其使用方法
- Patent Title: Film bulk acoustic wave resonator-based high energy radiation detectors and methods using the same
- Patent Title (中): 基于薄膜体声波谐振器的高能辐射探测器及其使用方法
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Application No.: US13513287Application Date: 2011-01-20
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Publication No.: US08704191B2Publication Date: 2014-04-22
- Inventor: Hongyu Yu , Jonathon Keith Oiler , Hugh James Barnaby
- Applicant: Hongyu Yu , Jonathon Keith Oiler , Hugh James Barnaby
- Applicant Address: US AZ Scottsdale
- Assignee: Arizona Board of Regents, a Body Corporate of the State of Arizona, Acting for and on Behalf of Arizona State University
- Current Assignee: Arizona Board of Regents, a Body Corporate of the State of Arizona, Acting for and on Behalf of Arizona State University
- Current Assignee Address: US AZ Scottsdale
- Agency: McDonnell Boehnen Hulbert & Berghoff LLP
- International Application: PCT/US2011/021814 WO 20110120
- International Announcement: WO2011/142845 WO 20111117
- Main IPC: G01T1/16
- IPC: G01T1/16 ; G01N29/036 ; G01T1/161
Abstract:
The present invention relates generally to the detection of high energy radiation. The present invention relates more particularly to the film bulk acoustic wave resonator-based devices, and their use in the detection of high energy radiation. One aspect of the invention is a method for detecting high energy radiation, the method comprising providing a film bulk acoustic wave resonator having a zinc oxide piezoelectric layer in substantial contact with a dielectric layer; exposing the film bulk acoustic wave resonator to the high energy radiation; determining the resonant frequency of the film bulk acoustic wave resonator; and determining the dose of high energy radiation using the resonant frequency of the film bulk acoustic wave resonator.
Public/Granted literature
- US20120326050A1 Film Bulk Acoustic Wave Resonator-Based High Energy Radiation Detectors and Methods Using the Same Public/Granted day:2012-12-27
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