Invention Grant
US08704198B2 Efficient high-harmonic-generation-based EUV source driven by short wavelength light
有权
基于短波长光源驱动的高效高次谐波发射型EUV源
- Patent Title: Efficient high-harmonic-generation-based EUV source driven by short wavelength light
- Patent Title (中): 基于短波长光源驱动的高效高次谐波发射型EUV源
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Application No.: US12966574Application Date: 2010-12-13
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Publication No.: US08704198B2Publication Date: 2014-04-22
- Inventor: Franz X. Kaertner , Edilson L. Falcao-Filho , Chien-Jen Lai , Kyung-Han Hong , Tso Yee Fan
- Applicant: Franz X. Kaertner , Edilson L. Falcao-Filho , Chien-Jen Lai , Kyung-Han Hong , Tso Yee Fan
- Applicant Address: US MA Cambridge
- Assignee: Massachusetts Institute of Technology
- Current Assignee: Massachusetts Institute of Technology
- Current Assignee Address: US MA Cambridge
- Agency: Modern Times Legal
- Agent Robert J. Sayre
- Main IPC: G02F1/37
- IPC: G02F1/37
Abstract:
Extreme ultraviolet radiation is generated based on high-order harmonic generation. First, a driver pulse is generated from a drive laser. Second, the infrared driver pulse is passed through a second harmonic generator with an output wavelength in the range from 400 to 700 nm. Third, the pulse is then passed through a gas medium, which can be inside a resonant cavity, to generate a high-order harmonic in the form of extreme ultraviolet radiation.
Public/Granted literature
- US20110140009A1 Efficient High-Harmonic-Generation-Based EUV Source Driven by Short Wavelength Light Public/Granted day:2011-06-16
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