Invention Grant
- Patent Title: Production method of a layered body
- Patent Title (中): 分层体的生产方法
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Application No.: US13508747Application Date: 2010-11-09
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Publication No.: US08704239B2Publication Date: 2014-04-22
- Inventor: Toru Kinoshita , Kazuya Takada
- Applicant: Toru Kinoshita , Kazuya Takada
- Applicant Address: JP Yamaguchi
- Assignee: Tokuyama Corporation
- Current Assignee: Tokuyama Corporation
- Current Assignee Address: JP Yamaguchi
- Agency: Cahn & Samuels, LLP
- Priority: JP2009-256626 20091110
- International Application: PCT/JP2010/069929 WO 20101109
- International Announcement: WO2011/058968 WO 20110519
- Main IPC: H01L31/036
- IPC: H01L31/036 ; C30B25/02

Abstract:
Disclosed is a novel method for group III polarity growth on a sapphire substrate. Specifically disclosed is a method for producing a laminate wherein a group III nitride single crystal layer is laminated on a sapphire substrate by an MOCVD method. The method for producing a laminate comprises: a pretreatment step in which an oxygen source gas is supplied onto the sapphire substrate; a first growth step in which an initial single crystal layer that contains oxygen at a concentration of 5×1020 cm−3 or more but 5×1021 cm−3 or less is grown with a thickness of 3 nm or more but less than 15 nm by supplying the oxygen source gas onto the sapphire substrate together with a starting material gas for the growth of the group III nitride; and a second growth step in which a group III nitride single crystal layer that is reduced in the oxygen concentration in comparison to the initial single crystal layer is grown by supplying the starting material gas onto the initial single crystal layer without supplying the oxygen source thereto, or alternatively by supplying the oxygen source, together with the starting material gas, at a lower supply rate than that in the first growth step.
Public/Granted literature
- US20120223329A1 Production Method of a Layered Body Public/Granted day:2012-09-06
Information query
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