Invention Grant
- Patent Title: Method for forming a back-side illuminated image sensor
- Patent Title (中): 用于形成背面照明图像传感器的方法
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Application No.: US13445013Application Date: 2012-04-12
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Publication No.: US08704282B2Publication Date: 2014-04-22
- Inventor: Michel Marty , François Roy , Jens Prima
- Applicant: Michel Marty , François Roy , Jens Prima
- Applicant Address: FR Montrouge FR Crolles
- Assignee: STMicroelectronics S.A.,STMicroelectronics (Crolles 2) SAS
- Current Assignee: STMicroelectronics S.A.,STMicroelectronics (Crolles 2) SAS
- Current Assignee Address: FR Montrouge FR Crolles
- Agency: Wolf, Greenfield & Sacks, P.C.
- Priority: FR1153179 20110412
- Main IPC: H01L31/113
- IPC: H01L31/113 ; H01L31/18

Abstract:
A method for forming a back-side illuminated image sensor from a semiconductor substrate, including the steps of: a) thinning the substrate from its rear surface; b) depositing, on the rear surface of the thinned substrate, an amorphous silicon layer of same conductivity type as the substrate but of higher doping level; and c) annealing at a temperature enabling to recrystallized the amorphous silicon to stabilize it.
Public/Granted literature
- US20120261732A1 METHOD FOR FORMING A BACK-SIDE ILLUMINATED IMAGE SENSOR Public/Granted day:2012-10-18
Information query
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