Invention Grant
US08704311B2 Semiconductor device having epitaxial semiconductor layer above impurity layer
有权
具有在杂质层上方的外延半导体层的半导体器件
- Patent Title: Semiconductor device having epitaxial semiconductor layer above impurity layer
- Patent Title (中): 具有在杂质层上方的外延半导体层的半导体器件
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Application No.: US13343078Application Date: 2012-01-04
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Publication No.: US08704311B2Publication Date: 2014-04-22
- Inventor: Kazushi Fujita , Taiji Ema , Hiroyuki Ogawa
- Applicant: Kazushi Fujita , Taiji Ema , Hiroyuki Ogawa
- Applicant Address: JP Yokohama
- Assignee: Fujitsu Semiconductor Limited
- Current Assignee: Fujitsu Semiconductor Limited
- Current Assignee Address: JP Yokohama
- Agency: Fujitsu Patent Center
- Priority: JP2011-047764 20110304
- Main IPC: H01L23/62
- IPC: H01L23/62 ; H01L29/76 ; H01L29/94 ; H01L31/062 ; H01L31/113 ; H01L31/119

Abstract:
The semiconductor device includes a first transistor including a first impurity layer of a first conductivity type formed in a first region of a semiconductor substrate, a first epitaxial semiconductor layer formed above the first impurity layer, a first gate insulating film formed above the first epitaxial semiconductor layer, and a first gate electrode formed above the first gate insulating film, and a second transistor including a second impurity layer of the second conductivity type formed in a second region of the semiconductor substrate, a second epitaxial semiconductor layer formed above the second impurity layer and having a thickness different from that of the first epitaxial semiconductor layer, a second gate insulating film formed above the second epitaxial semiconductor layer and having a film thickness equal to that of the first gate insulating film and a second gate electrode formed above the second gate insulating film.
Public/Granted literature
- US20120223391A1 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE Public/Granted day:2012-09-06
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