Invention Grant
- Patent Title: Selective removal of on-die redistribution interconnects from scribe-lines
- Patent Title (中): 从划线中选择性地去除片上再分配互连
-
Application No.: US11848879Application Date: 2007-08-31
-
Publication No.: US08704336B2Publication Date: 2014-04-22
- Inventor: Jun He , Kevin J. Lee , Subhash Joshi
- Applicant: Jun He , Kevin J. Lee , Subhash Joshi
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Cool Patent, P.C.
- Main IPC: H01L23/544
- IPC: H01L23/544

Abstract:
Selective removal of on-die redistribution interconnect material from a scribe-line region is generally described. In one example, an apparatus includes a first semiconductor die having a redistribution layer comprising redistribution dielectric and one or more redistribution metal interconnects, a second semiconductor die coupled with the first semiconductor die, the second semiconductor die having a redistribution layer comprising redistribution dielectric and one or more redistribution metal interconnects, and a scribe-line region disposed between the first semiconductor die and second semiconductor die, the scribe-line region having a majority or substantially all of redistribution dielectric or redistribution metal, or suitable combinations thereof, selectively removed to enable die singulation through the scribe-line region.
Public/Granted literature
- US20090057842A1 SELECTIVE REMOVAL OF ON-DIE REDISTRIBUTION INTERCONNECTS FROM SCRIBE-LINES Public/Granted day:2009-03-05
Information query
IPC分类: