Invention Grant
- Patent Title: Methods and apparatus for calculating electromagnetic scattering properties of a structure using a normal-vector field and for reconstruction of approximate structures
- Patent Title (中): 用于使用法向矢量场计算结构的电磁散射特性并重建近似结构的方法和装置
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Application No.: US12905447Application Date: 2010-10-15
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Publication No.: US08706455B2Publication Date: 2014-04-22
- Inventor: Martijn Constant Van Beurden , Irwan Dani Setija , Remco Dirks
- Applicant: Martijn Constant Van Beurden , Irwan Dani Setija , Remco Dirks
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C
- Main IPC: G06F7/60
- IPC: G06F7/60 ; G06G7/56 ; G06G7/48

Abstract:
A projection operator framework is described to analyze the concept of localized normal-vector fields within field-material interactions in a spectral basis, in isotropic and anisotropic media. Generate a localized normal-vector field n in a region of the structure defined by the material boundary, decomposed into sub-regions with a predefined normal-vector field and possibly corresponding closed-form integrals. Construct a continuous vector field F using the normal-vector field to select continuous components ET and Dn. Localized integration of normal-vector field n over the sub-regions to determine coefficients of, C. Determine components Ex, Ey, Ez of the electromagnetic field by using field-material interaction operator C to operate on vector field F. Calculate electromagnetic scattering properties of the structure using the determined components of the electromagnetic field.
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