Invention Grant
- Patent Title: Nanoparticles in a flash memory using chaperonin proteins
- Patent Title (中): 使用伴侣蛋白的闪存中的纳米颗粒
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Application No.: US11915039Application Date: 2006-05-22
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Publication No.: US08709892B2Publication Date: 2014-04-29
- Inventor: Chuanbin Mao , Shan Tang , Sanjay Banerjee
- Applicant: Chuanbin Mao , Shan Tang , Sanjay Banerjee
- Applicant Address: US VA Alexandria
- Assignee: Darpa
- Current Assignee: Darpa
- Current Assignee Address: US VA Alexandria
- Agency: Winstead, P.C.
- Agent Robert A. Voigt, Jr.
- International Application: PCT/US2006/019713 WO 20060522
- International Announcement: WO2006/127589 WO 20061130
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A method for fabricating a flash memory device where the flash memory device includes a substantially uniform size and spatial distribution of nanoparticles on a tunnel oxide layer to form a floating gate. The flash memory device may be fabricated by defining active areas in a substrate and forming an oxide layer on the substrate. A self-assembled protein lattice may be formed on top of the oxide layer where the self-assembled protein lattice includes a plurality of molecular chaperones. The cavities of the chaperones may provide confined spaces where nanocrystals can be trapped thereby forming an ordered nanocrystal lattice. A substantially uniform distribution of nanocrystals may be formed on the oxide layer upon removal of the self-assembled protein lattice such as through high temperature annealing.
Public/Granted literature
- US20080191265A1 Nanoparticles In a Flash Memory Using Chaperonin Proteins Public/Granted day:2008-08-14
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