Invention Grant
US08709892B2 Nanoparticles in a flash memory using chaperonin proteins 有权
使用伴侣蛋白的闪存中的纳米颗粒

  • Patent Title: Nanoparticles in a flash memory using chaperonin proteins
  • Patent Title (中): 使用伴侣蛋白的闪存中的纳米颗粒
  • Application No.: US11915039
    Application Date: 2006-05-22
  • Publication No.: US08709892B2
    Publication Date: 2014-04-29
  • Inventor: Chuanbin MaoShan TangSanjay Banerjee
  • Applicant: Chuanbin MaoShan TangSanjay Banerjee
  • Applicant Address: US VA Alexandria
  • Assignee: Darpa
  • Current Assignee: Darpa
  • Current Assignee Address: US VA Alexandria
  • Agency: Winstead, P.C.
  • Agent Robert A. Voigt, Jr.
  • International Application: PCT/US2006/019713 WO 20060522
  • International Announcement: WO2006/127589 WO 20061130
  • Main IPC: H01L21/336
  • IPC: H01L21/336
Nanoparticles in a flash memory using chaperonin proteins
Abstract:
A method for fabricating a flash memory device where the flash memory device includes a substantially uniform size and spatial distribution of nanoparticles on a tunnel oxide layer to form a floating gate. The flash memory device may be fabricated by defining active areas in a substrate and forming an oxide layer on the substrate. A self-assembled protein lattice may be formed on top of the oxide layer where the self-assembled protein lattice includes a plurality of molecular chaperones. The cavities of the chaperones may provide confined spaces where nanocrystals can be trapped thereby forming an ordered nanocrystal lattice. A substantially uniform distribution of nanocrystals may be formed on the oxide layer upon removal of the self-assembled protein lattice such as through high temperature annealing.
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