Invention Grant
- Patent Title: Deflection device for a scanner with Lissajous scanning
- Patent Title (中): 带有Lissajous扫描的扫描仪偏转装置
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Application No.: US13494463Application Date: 2012-06-12
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Publication No.: US08711456B2Publication Date: 2014-04-29
- Inventor: Ulrich Hofmann , Manfred Weiss
- Applicant: Ulrich Hofmann , Manfred Weiss
- Applicant Address: DE Munich
- Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Current Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Current Assignee Address: DE Munich
- Agency: Faegre Baker Daniels LLP
- Priority: DE102011104556 20110615
- Main IPC: G02B26/08
- IPC: G02B26/08

Abstract:
A deflection device for a scanner with Lissajous scanning includes a micromirror that oscillates in at least two deflection axes and that includes a frame and a mirror plate that is movably arranged via a suspension mount. The deflection device also includes a control device for generating control signals for a resonant operation of the micromirror in the at least two deflection axes. The suspension mount includes at least one spring connected at one end to the mirror plate and at the other end to the frame. The frequencies of the control signals for the resonant operation of the micromirror are substantially equal in the at least two deflection axes, but differ at least in terms of the predefined scanning repetition rate. The levels of the resonance frequencies of the deflection axes and control signals are determined by a predefined scanning resolution and a predefined scanning repetition rate.
Public/Granted literature
- US20120320379A1 DEFLECTION DEVICE FOR A SCANNER WITH LISSAJOUS SCANNING Public/Granted day:2012-12-20
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