Invention Grant
- Patent Title: Fabrication of thin pellicle beam splitters
- Patent Title (中): 薄薄膜分束器的制造
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Application No.: US12991106Application Date: 2008-05-06
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Publication No.: US08711484B2Publication Date: 2014-04-29
- Inventor: Jong-Souk Yeo , Sagi V. Mathai , Michael Renne Ty Tan
- Applicant: Jong-Souk Yeo , Sagi V. Mathai , Michael Renne Ty Tan
- Applicant Address: US TX Houston
- Assignee: Hewlett-Packard Development Company, L.P.
- Current Assignee: Hewlett-Packard Development Company, L.P.
- Current Assignee Address: US TX Houston
- International Application: PCT/US2008/062794 WO 20080506
- International Announcement: WO2009/136914 WO 20091112
- Main IPC: G02B27/14
- IPC: G02B27/14 ; G02B26/00 ; G02B27/12
Abstract:
A method for fabricating a pellicle beam splitter includes etching an aperture in a support substrate; bonding a beam splitter substrate to an upper surface of the support substrate so that the beam splitter substrate covers the aperture; and depositing at least one optical coating on the beam splitter substrate. A pellicle beam splitter includes a support substrate, an aperture created in the support substrate using a semiconductor fabrication processes and a beam-splitting coating covering the aperture.
Public/Granted literature
- US20110063733A1 FABRICATION OF THIN PELLICLE BEAM SPLITTERS Public/Granted day:2011-03-17
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