Invention Grant
US08714013B2 Acceleration detector, acceleration detecting device, inclination sensor, inclination sensor device, and electronic device 有权
加速度检测器,加速度检测装置,倾斜传感器,倾斜传感器装置和电子装置

Acceleration detector, acceleration detecting device, inclination sensor, inclination sensor device, and electronic device
Abstract:
An acceleration detector includes a base portion, a plate-like movable portion connected to the base portion via a joint portion, an acceleration detecting element laid over the base portion and the movable portion, and a supporting portion having a part extending along the movable portion from the base portion, as viewed in a plan view. A mass portion partly overlapping the supporting portion, as viewed in a plan view, is arranged on at least one of two main surfaces of the movable portion. The movable portion is displaceable about the joint portion as a fulcrum in a direction intersecting the main surface according to an acceleration applied in the direction intersecting the main surface. A space is provided between the mass portion and the supporting portion in an area where the mass portion and the supporting portion overlap each other.
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