Invention Grant
US08714713B2 Liquid ejecting head, liquid ejecting apparatus, and piezoelectric element 有权
液体喷射头,液体喷射装置和压电元件

Liquid ejecting head, liquid ejecting apparatus, and piezoelectric element
Abstract:
A piezoelectric element comprises a silicon oxide layer, an intermediate layer provided above the silicon oxide layer, a first electrode provided above the intermediate layer, a piezoelectric layer provided above the intermediate layer, and a second electrode provided above the piezoelectric layer. The piezoelectric layer is configured of a complex oxide having a perovskite structure and containing at least bismuth and iron. The intermediate layer contains magnesium oxide and/or aluminum oxide.
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