Invention Grant
- Patent Title: Double vacuum pump apparatus, gas purification system provided with double vacuum pump apparatus, and exhaust gas vibration suppressing device in double vacuum pump apparatus
- Patent Title (中): 双真空泵装置，具有双真空泵装置的气体净化系统和双真空泵装置中的废气振动抑制装置
-
Application No.: US13518257Application Date: 2010-12-22
-
Publication No.: US08715400B2Publication Date: 2014-05-06
- Inventor: Kazuo Haruna , Kiyokazu Maruta , Hidenori Kuwata , Koichi Shima
- Applicant: Kazuo Haruna , Kiyokazu Maruta , Hidenori Kuwata , Koichi Shima
- Applicant Address: JP Hyogo
- Assignee: Sumitomo Seiko Chemicals Co., Ltd.
- Current Assignee: Sumitomo Seiko Chemicals Co., Ltd.
- Current Assignee Address: JP Hyogo
- Agency: Hamre, Schumann, Mueller & Larson, P.C.
- Priority: JP2009-291796 20091224; JP2010-223841 20101001
- International Application: PCT/JP2010/073091 WO 20101222
- International Announcement: WO2011/078207 WO 20110630
- Main IPC: B01D53/02
- IPC: B01D53/02 ; F04B41/06 ; F04B37/14 ; F04B37/16 ; B01D53/04 ; B01D53/047
Abstract:
A double vacuum pump apparatus (Y2) includes positive displacement vacuum pumps (40A, 40B) and lines (52, 60). Each of the vacuum pumps includes a suction port (41) and a discharge port (42), and a pressure detector (80) is provided in the vicinity of the suction port (41) of the double vacuum pump apparatus (Y2). The line (52) connects the discharge port (42) of the vacuum pump (40A) to the suction port (41) of the vacuum pump (40B). The line (60) has an end (E6) and an end (E5) that are connected to the connection line (52), and includes a buffer tube (Z1) and an on-off valve (61) located between the tube (Z1) and the end (E5). A pressure detection signal from the pressure detector (80) is used as an on/off signal for the on-off valve (61).
Public/Granted literature
Information query
IPC分类:
