Invention Grant
- Patent Title: Water-reactive Al composite material, water-reactive Al film, process for the production of the Al film, and constituent member for film-forming chamber
- Patent Title (中): 水反应性Al复合材料，水反应性Al膜，制备Al膜的方法和成膜室的构成部件
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Application No.: US12990141Application Date: 2009-04-27
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Publication No.: US08715404B2Publication Date: 2014-05-06
- Inventor: Yutaka Kadowaki , Tomoko Saitou , Keng Weng Lim , Katsuhiko Mushiake
- Applicant: Yutaka Kadowaki , Tomoko Saitou , Keng Weng Lim , Katsuhiko Mushiake
- Applicant Address: JP Kanagawa
- Assignee: Ulvac, Inc.
- Current Assignee: Ulvac, Inc.
- Current Assignee Address: JP Kanagawa
- Agency: Arent Fox LLP
- Priority: JP2008-118852 20080430
- International Application: PCT/JP2009/058256 WO 20090427
- International Announcement: WO2009/133837 WO 20091105
- Main IPC: C09D1/00
- IPC: C09D1/00 ; B05D1/02
Abstract:
Herein disclosed are a water-reactive Al composite material which comprises 4NAI or 5NAI containing added In in an amount ranging from 2 to 5% by mass; and added Si and Si as an impurity in a total amount ranging from 0.04 to 0.6% by mass on the basis of the amount of Al; a thermally sprayed Al film prepared using this material; a method for the production of such an Al film; and a constituent member for a film-forming chamber, which is provided with this thermally sprayed Al film on the surface thereof.
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