Invention Grant
US08715418B2 Semiconductor processing system; a semiconductor processing chamber; and a method for loading, unloading and exchanging semiconductor work pieces from a semiconductor processing chamber 有权
半导体处理系统; 半导体处理室; 以及用于从半导体处理室加载,卸载和交换半导体工件的方法

  • Patent Title: Semiconductor processing system; a semiconductor processing chamber; and a method for loading, unloading and exchanging semiconductor work pieces from a semiconductor processing chamber
  • Patent Title (中): 半导体处理系统; 半导体处理室; 以及用于从半导体处理室加载,卸载和交换半导体工件的方法
  • Application No.: US11440747
    Application Date: 2006-05-24
  • Publication No.: US08715418B2
    Publication Date: 2014-05-06
  • Inventor: AiHua Chen
  • Applicant: AiHua Chen
  • Applicant Address: KY George Town, Grand Cayman
  • Assignee: Advanced Micro-Fabrication Equipment, Inc. Asia
  • Current Assignee: Advanced Micro-Fabrication Equipment, Inc. Asia
  • Current Assignee Address: KY George Town, Grand Cayman
  • Agency: Nixon Peabody LLP
  • Agent Joseph Bach, Esq.
  • Priority: CN200510028562 20050805
  • Main IPC: C23C16/00
  • IPC: C23C16/00 H01L21/68
Semiconductor processing system; a semiconductor processing chamber; and a method for loading, unloading and exchanging semiconductor work pieces from a semiconductor processing chamber
Abstract:
A semiconductor processing system and related methodology is disclosed and which includes a processing chamber having an internal cavity and a transfer port; a transfer chamber which is positioned adjacent to the processing chamber; and a transfer apparatus having at least two extendible arms which are positioned within the transfer chamber, and wherein each of the extendible arms carry a semiconductor work piece into and out of the processing chamber by way of the transfer port, and wherein the at least two extendible arms are selectively vertically moveable, and further are each selectively moveable in the direction of the transfer port.
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