Invention Grant
- Patent Title: Method for producing spectroscopic sensor
- Patent Title (中): 光谱传感器的制造方法
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Application No.: US13817876Application Date: 2011-09-21
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Publication No.: US08715443B2Publication Date: 2014-05-06
- Inventor: Katsumi Shibayama , Masaomi Takasaka
- Applicant: Katsumi Shibayama , Masaomi Takasaka
- Applicant Address: JP Hamamatsu-shi, Shizuoka
- Assignee: Hamamatsu Photonics K.K.
- Current Assignee: Hamamatsu Photonics K.K.
- Current Assignee Address: JP Hamamatsu-shi, Shizuoka
- Agency: Drinker Biddle & Reath LLP
- Priority: JP2010-260440 20101122
- International Application: PCT/JP2011/071535 WO 20110921
- International Announcement: WO2012/070301 WO 20120531
- Main IPC: G01J3/28
- IPC: G01J3/28

Abstract:
A method of manufacturing a spectroscopic sensor 1 comprises a first step of forming a cavity layer 21 by nanoimprinting on a handle substrate; a second step of forming a first mirror layer 22 on the cavity layer 21 after the first step; a third step of joining a light-transmitting substrate 3 onto the first mirror layer 22 after the second step; a fourth step of removing the handle substrate from the cavity layer 21 after the third step; a fifth step of forming a second mirror layer 23 on the cavity layer 21 without the handle substrate after the fourth step; and a sixth step of joining the light detection substrate 4 onto the second mirror layer 23 after the fifth step.
Public/Granted literature
- US20130153139A1 METHOD FOR PRODUCING SPECTROSCOPIC SENSOR Public/Granted day:2013-06-20
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