Invention Grant
US08715471B2 Magnetron sputter cathode 有权
磁控溅射阴极

Magnetron sputter cathode
Abstract:
To be able to realize a relatively wide magnetron sputter cathode, it is proposed that on the vacuum side of a carrier (2) is disposed the sputter target (4) with a backing plate (3), which maintains a gap (14) from the carrier (2). The backing plate (3) is developed as a cooling plate. In it are located cooling means channels (15), which, via an inlet (16) through the carrier (2), are supplied with cooling fluid, which can flow out again via an outlet (17) through the carrier (2). On the atmospheric side is located a magnet configuration (5).
Public/Granted literature
Information query
Patent Agency Ranking
0/0