Invention Grant
- Patent Title: Liquid chemical deposition apparatus and process and products therefrom
- Patent Title (中): 液体化学沉积设备及其工艺和产品
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Application No.: US13675334Application Date: 2012-11-13
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Publication No.: US08715814B2Publication Date: 2014-05-06
- Inventor: L. Pierre de Rochemont
- Applicant: L. Pierre de Rochemont
- Agency: Burns & Levinson, LLP
- Agent Jacob N. Erlich; David W. Gomes
- Main IPC: B32B5/00
- IPC: B32B5/00 ; H01L31/062
Abstract:
A method, apparatus and material produced thereby in an amorphous or crystalline form having multiple elements with a uniform molecular distribution of elements at the molecular level.
Public/Granted literature
- US20130095306A1 LIQUID CHEMICAL DEPOSTION APPARATUS AND PROCESS AND PRODUCTS THEREFROM Public/Granted day:2013-04-18
Information query
