Invention Grant
- Patent Title: Self-imageable layer forming polymer and compositions thereof
- Patent Title (中): 自成像层形成聚合物及其组合物
-
Application No.: US13550586Application Date: 2012-07-16
-
Publication No.: US08715900B2Publication Date: 2014-05-06
- Inventor: Osamu Onishi , Haruo Ikeda , Nobuo Tagashira , Larry Rhodes , Pramod Kandanarachchi
- Applicant: Osamu Onishi , Haruo Ikeda , Nobuo Tagashira , Larry Rhodes , Pramod Kandanarachchi
- Applicant Address: US OH Brecksville JP Tokyo
- Assignee: Promerus, LLC,Sumitomo Bakelite Co., Ltd.
- Current Assignee: Promerus, LLC,Sumitomo Bakelite Co., Ltd.
- Current Assignee Address: US OH Brecksville JP Tokyo
- Agent Balaram Gupta; Michael W. Ferrell
- Main IPC: G03F7/22
- IPC: G03F7/22 ; G03F7/039
Abstract:
Copolymers and compositions thereof useful for forming self-imageable films encompassing such copolymers are disclosed. Such copolymers encompass norbornene-type repeating units and maleic anhydride-type repeating units where at least some of such and maleic anhydride-type repeating units have been ring-opened. The films formed from such copolymer compositions provide self imageable, low-k, thermally stable layers for use in microelectronic and optoelectronic devices.
Public/Granted literature
- US20130017488A1 Self-Imageable Layer Forming Polymer and Compositions Thereof Public/Granted day:2013-01-17
Information query
IPC分类:
