Invention Grant
US08715901B2 Resin composition for forming fine pattern and method for forming fine pattern
有权
用于形成精细图案的树脂组合物和形成精细图案的方法
- Patent Title: Resin composition for forming fine pattern and method for forming fine pattern
- Patent Title (中): 用于形成精细图案的树脂组合物和形成精细图案的方法
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Application No.: US11597332Application Date: 2005-05-24
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Publication No.: US08715901B2Publication Date: 2014-05-06
- Inventor: Hirokazu Sakakibara , Takayoshi Abe , Takashi Chiba , Toru Kimura
- Applicant: Hirokazu Sakakibara , Takayoshi Abe , Takashi Chiba , Toru Kimura
- Applicant Address: JP Tokyo
- Assignee: JSR Corporation
- Current Assignee: JSR Corporation
- Current Assignee Address: JP Tokyo
- Agency: Ditthavong Mori & Steiner, P.C.
- Priority: JP2004-156741 20040526; JP2004-351295 20041203
- International Application: PCT/JP2005/009394 WO 20050524
- International Announcement: WO2005/116776 WO 20051208
- Main IPC: G03F7/00
- IPC: G03F7/00 ; G03F7/004 ; G03F7/028 ; G03F7/40

Abstract:
A resin composition which, in forming a fine pattern by a heat treatment of a resist pattern formed by using a photoresist, can be applied onto the resist pattern, can cause the resist pattern to smoothly shrink by heat treatment, and can be easily washed away by a treatment with an alkaline aqueous solution, and a method for efficiently forming a fine resist pattern using the resin composition are provided. The resin composition comprises a resin containing a hydroxyl group, a crosslinking component, and an alcohol solvent containing water in an amount of 10 wt % or less for the total solvent, wherein the alcohol in the alcohol solvent is a monovalent alcohol having 1 to 8 carbon atoms.
Public/Granted literature
- US20070259287A1 Resin Composition for Forming Fine Pattern and Method for Forming Fine Pattern Public/Granted day:2007-11-08
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