Invention Grant
US08715905B2 Silphenylene-containing photocurable composition, pattern formation method using same, and optical semiconductor element obtained using the method
有权
含有亚苯基苯的可光固化组合物,使用其的图案形成方法以及使用该方法获得的光学半导体元件
- Patent Title: Silphenylene-containing photocurable composition, pattern formation method using same, and optical semiconductor element obtained using the method
- Patent Title (中): 含有亚苯基苯的可光固化组合物,使用其的图案形成方法以及使用该方法获得的光学半导体元件
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Application No.: US14019910Application Date: 2013-09-06
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Publication No.: US08715905B2Publication Date: 2014-05-06
- Inventor: Shohei Tagami , Takato Sakurai , Hideto Kato
- Applicant: Shin-Etsu Chemical Co., Ltd.
- Applicant Address: JP Chiyoda-ku
- Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee Address: JP Chiyoda-ku
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2010-139535 20100618
- Main IPC: G03F7/00
- IPC: G03F7/00 ; G03F7/004 ; G03F7/40 ; G03F7/028

Abstract:
Provided is a silphenylene-containing photocurable composition including: (A) a specific silphenylene having both terminals modified with alicyclic epoxy groups, and (C) a photoacid generator that generates acid upon irradiation with light having a wavelength of 240 to 500 nm. Also provided is a pattern formation method including: (i) forming a film of the photocurable composition on a substrate, (ii) exposing the film through a photomask with light having a wavelength of 240 to 500 nm, and if necessary, performing heating following the exposure, and (iii) developing the film in a developing liquid, and if necessary, performing post-curing at a temperature within a range from 120 to 300° C. following the developing. Further provided is an optical semiconductor element obtained by performing pattern formation using the method. The composition is capable of very fine pattern formation across a broad range of wavelengths, and following pattern formation, yields a film that exhibits a high degree of transparency and superior light resistance. The composition may also include: (B) a specific epoxy group-containing organosilicon compound.
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