Invention Grant
US08715916B2 Pattern forming method and resist underlayer film-forming composition
有权
图案形成方法和抗蚀剂下层膜形成组合物
- Patent Title: Pattern forming method and resist underlayer film-forming composition
- Patent Title (中): 图案形成方法和抗蚀剂下层膜形成组合物
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Application No.: US13430691Application Date: 2012-03-27
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Publication No.: US08715916B2Publication Date: 2014-05-06
- Inventor: Shin-ya Minegishi , Shin-ya Nakafuji , Takanori Nakano
- Applicant: Shin-ya Minegishi , Shin-ya Nakafuji , Takanori Nakano
- Applicant Address: JP Tokyo
- Assignee: JSR Corporation
- Current Assignee: JSR Corporation
- Current Assignee Address: JP Tokyo
- Agency: Ditthavong Mori & Steiner, P.C.
- Priority: JP2009-225440 20090929
- Main IPC: G03F7/40
- IPC: G03F7/40 ; H01L21/027

Abstract:
A pattern-forming method includes forming a resist underlayer film on a substrate using a resist underlayer film-forming composition. The resist underlayer film-forming composition includes a base component, and a crosslinking agent. The crosslinking agent has a partial structure represented by a following general formula (i). X represents an oxygen atom, a sulfur atom, or —NR—. R represents a hydrogen atom, an alkyl group having 1 to 9 carbon atoms, or an aryl group having 6 to 30 carbon atoms. n1 is an integer from 1 to 6. R1 represents a hydrogen atom, an alkyl group having 1 to 9 carbon atoms, or an aryl group having 6 to 30 carbon atoms.
Public/Granted literature
- US20120181251A1 PATTERN FORMING METHOD AND RESIST UNDERLAYER FILM-FORMING COMPOSITION Public/Granted day:2012-07-19
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